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Thermo Scientific™ SURF-CAL™ Particle Size Standards
Simplify the preparation of calibration wafers with these particle size standards.
Brand: Thermo Scientific™ PD-100
This item is not returnable.
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Description
Simplify the preparation of calibration wafers with Thermo Scientific™ SURF-CAL™ Particle Size Standards, for calibration and maintenance of Scanning Surface Inspection Systems (SSIS). Available particle sizes correspond to the calibration point sizes required by instrument manufacturers.
Thermo Fisher Scientific™, along with the Semiconductor Industry and SEMI, have established specific particle sizes to be used when calibrating Scanning Surface Inspection Systems. Working with instrument manufacturers, we created the SURF-CAL™ product line to meet SEMI standard guidelines.- Available sizes are considered to be critical sizing nodes as defined by the International Technology Roadmap for Semiconductors (ITRS).
- By depositing SURF-CAL™ NIST™ traceable polystyrene latex spheres (PSL) on specially selected wafers, you can perform periodic calibration checks and compare your scanner with scanners at other locations.
- You can also assess the performance of your SSIS at critical stages in the manufacturing process.
- All products are suspended in deionized, filtered water in 50mL bottles at a concentration of 3 × 108 particles per mL.
Note:
Products PD1100 and smaller are also available at 1010 particles per mL for applications using the aid of a Differential Mobility Analyzer (DMA) or other size exclusionary techniques.
Specifications
| None | |
| Unless otherwise stated, refrigerate (2° to 8°C) product when not in use but do not freeze. Store upright and keep bottle tightly sealed. Mix product with gentle inversion by hand or vortex mixer. | |
| Particles for calibration and maintenance of Scanning Surface Inspection Systems (SSIS) | |
| SSIS Calibration and Maintenance | |
| Size Standard Particles | |
| 1.05g/cm³ | |
| 1.59 at 589nm (25°C) | |
| Product stable for a minimum of 12 months |
| 3 x 108 particles/mL | |
| Polystyrene microspheres in deionized, filtered water | |
| White or Colorless | |
| Polystyrene | |
| Certificate of Calibration and Traceability to NIST | |
| 50 mL | |
| 0.003µm | |
| 0.100 μm |